高精度六面体垂直度误差测量的一种新方法

介绍了一种利用波面干涉仪和精度为0.2″的端齿盘组合测量六面体相邻两面垂直度误差的新方法,建立了基于最小二乘算法的评定垂直度误差分布的数学模型,介绍了测量装置及测量实验步骤。该方法不但测量精度高,而且能够获得两个面之间垂直度误差分布数据,可用于六面体面体形位误差的高精度修形加工。针对精度为2″的标准直角棱镜的测量实验表明该方法测量结果可信,精度优于0.5″。可推广到其他多面体类零件形位误差的高精度测量。

A novel method for perpendicularity measurement of high precision hexahedron

A novel method for perpendicularity measurement of hexahedron's adjacent faces is introduced.A mathematical model based on least square evaluation is derived.In this method,a dividing plate with an accuracy of 0.2" is adopted to give a specified angle between two measured face of the part.A wavefront interferometer is adopted to measure the attitude errors of each tested surface.Then not only the perpendicularity error,but also the error's distribution of the two measured face can be derived.This is very important in the part's error correction machining process.This method can achieve high measurement accuracy of 0.5".An optical prism with angular error of 2" is measured.The experiment result is analyzed using derived model.The result proves the validity and reliability of the measuring method.