Formation of multilayer strained-layer heterostructures by liquid epitaxy. I. Theoretical aspects of the problem and mathematical model

Problems concerned with the formation of multilayer strained-layer heterostructures by “capillary” liquid-phase epitaxy with forced hydraulic replacement of the solutions in the growth channel are analyzed. It is shown for short contact times between the solutions and the crystallization surface that the character of their flow in the channel plays an important role in the achievement of uniformity in the physical characteristics of the layers grown. Theoretical estimates of the hydrodynamic stability of solutions moving in narrow channels are performed for several III-V systems. A mathematical model, which permits simulation of the conditions under which strained-layer heterostructures are fabricated, is developed. It takes into account diffusive and convective mass transport in the liquid for various flow regimes in the capillary and the displacement of the heterogeneous equilibria in the system under the influence of elastic stresses. Zh. Tekh. Fiz. 67, 42–49 (July 1997)