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Photocatalytic and optical properties of titanium dioxide thin films prepared by metalorganic chemical vapor deposition
Affiliation:1. Department of Physics, Beni-Suef University, Beni-Suef 62111, Egypt;2. Process Development Division, Egyptian Research Institute, Nasr City, PO Box 9540, Cairo 11787, Egypt;1. State Key Laboratory of Crystal Materials, Shandong University, 250100 Jinan, Shandong, PR China;2. State Key Laboratory of Heavy Oil Processing & Center for Bioengineering and Biotechnology, China University of Petroleum (East China), 266580 Qingdao, PR China;1. School of Mechanical Engineering, VIT University, Vellore 632014, India;2. UPL, LEME, Univ. Paris Nanterre, 50 rue de Sèvres - 92410 Ville d''Avray, France;1. College of Physics and Engineering, Henan University of Science and Technology, Luoyang 471023, People''s Republic of China;2. College of Physical Science and Technology, Sichuan University, Chengdu 610065, People''s Republic of China;1. Institute of Atomic and Molecular Physics, Jilin University, Changchun 130012, China;2. Jilin Provincial Key Laboratory of Applied Atomic and Molecular Spectroscopy (Jilin University), Changchun, 130012, China;3. Department of Electrical and Computer Engineering, The University of North Carolina at Charlotte, Charlotte, NC 28223-0001, USA
Abstract:Titanium dioxide thin films have been deposited by metalorganic chemical vapor deposition (MOCVD) over sodalime glass substrates at substrate temperatures ranging from 250 °C to 450 °C. The effect of deposition temperature on the structure and microstructure of the obtained films has been studied by x-rays diffraction (XRD) and scanning electron microscopy (SEM), respectively. Diffraction patterns show the existence of a pure anatase phase beside a texture change with the increase of deposition temperature. Micrographs show grain fragmentation with the increase in deposition temperature. UV–Vis. spectra have been recorded by spectrophotometery. The optical energy gap has been calculated for the deposited films from the spectrophotometrical data. Photocatalytic experiments have been carried out. The photocatalytic activity has been found to decrease with the increase in deposition temperature.
Keywords:Titanium dioxide  Scanning electron microscope  Transmittance  Photocatalysis  Energy gap
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