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Influences of thin Ni layer on the electrical and absorption properties of PZT thin film pyroelectric IR sensors
Institution:1. Faculty of Mechanical Engineering and Automation, Zhejiang Sci-Tech University, Hangzhou, Zhejiang 310018, PR China;2. Key Laboratory of Automobile Materials, Department of Materials Science and Engineering, Jilin University, Changchun, Jilin 130025, PR China;3. Automotive Tribology Center, School of Engineering and Computer Science, Oakland University, Rochester, MI 48309, USA;4. College of Mechanical and Automotive Engineering, Zhejiang University of Water Resources and Electric Power, Hangzhou, Zhejiang 310018, PR China;5. Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province, School of Mechanical Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, PR China;1. School of Dental Technology, Taipei Medical University, Taipei 110, Taiwan;2. Department of Materials Engineering, Tatung University, Taipei 104, Taiwan;3. College of Oral Medicine, Taipei Medical University, Taipei 110, Taiwan;4. Research Center for Biomedical Devices and Prototyping Production, Taipei Medical University, Taipei 110, Taiwan;5. Department of Mechanical Engineering, National Central University, Taoyuan 320, Taiwan;1. Institute of Applied Physics RAS, Nizhny Novgorod, Russia;2. Peter the Great St. Petersburg, Polytechnic University, Saint-Petersburg, Russia;3. Nizhny Novgorod State University, Nizhny Novgorod, Russia;1. National Research Tomsk State University, 36 Lenin av., 634050 Tomsk, Russia;2. Rzhanov Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences, 13, akademika Lavrent’eva av., 630090 Novosibirsk, Russia
Abstract:A solid precursor was used to prepare ferroelectric lead zirconate titanate (PZT) 30/70 thin films using the sol–gel deposition method. To apply PZT thin films for uncooled pyroelectric IR sensors, a Ni layer was deposited onto the PZT thin films, serving both as a selective absorption layer and as the top electrode. The absorption properties of such Ni coated multi-layered pyroelectric sensors were studied in the visible and infrared wavelength ranges. The maximum absorption coefficient of this type of IR sensor was measured to be 0.8 at 0.633 μm and 0.7 at 4 μm wavelength, respectively. A striking asymmetric polarization hysteresis loop in these PZT thin films with Ni as the top electrode was observed as a direct consequence. This asymmetric polarization was attributed to cause the difference in the dynamic pyroelectric responses in these Ni/PZT/Pt films, poled either positively or negatively before the measurement.
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