ZnO thin film deposition on butterfly shaped electrodes for ultraviolet sensing applications

ZnO thin film was deposited on patterned gold electrodes using sol–gel spin coating technique. Conventional photo-lithography with wet etching process was used to create butterfly shaped 13 μm gap from zero gap chrome mask. The deposited thin film was characterized structurally, morphologically and electrically using X-ray diffraction, scanning electron microscope and Kiethly sourcemeter. Current–voltage (I–V) characterization was captured in dark and UV conditions. The current gain of the fabricated device was 1.36 and the response and recovery time of the sensor was 76 s and 104 s, respectively, showed the fabricated device can be used for UV applications.