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High-performance optics for thermal microscopy
Authors:Ikuo Arata  Yoshio Isobe  Toshimichi Ishizuka
Institution:(1) Systems Division, Hamamatsu Photonics K.K., 812 Joko-cho, Higashi-ku, Hamamatsu 431-3196, Japan
Abstract:We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis.
Keywords:thermal imaging  thermal microscopy  thermal emission analysis  InSb  failure analysis  semiconductor
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