High-performance optics for thermal microscopy |
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Authors: | Ikuo Arata Yoshio Isobe Toshimichi Ishizuka |
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Institution: | (1) Systems Division, Hamamatsu Photonics K.K., 812 Joko-cho, Higashi-ku, Hamamatsu 431-3196, Japan |
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Abstract: | We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system,
we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff
frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed
on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis. |
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Keywords: | thermal imaging thermal microscopy thermal emission analysis InSb failure analysis semiconductor |
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