| 精密宏微复合绝对式光栅尺设计与研究 |
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| 引用本文： | 范朝龙,王晗,刘强,陈新度,郑俊威,梁烽.精密宏微复合绝对式光栅尺设计与研究[J].应用光学,2015,36(2):287-293. |
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| 作者姓名： | 范朝龙 王晗 刘强 陈新度 郑俊威 梁烽 |
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| 作者单位： | 1.广东工业大学 广东省微纳加工技术与装备重点实验室,广东 广州 510006 |
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| 基金项目： | 国家自然科学基金(51305084);广东省引进创新科研团队专项(201001G0104781202);中国博士后科学基金 |
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| 摘 要： | 通过对光栅尺原理的研究，设计一种宏微复合切换测量模式，利用增量码进行低精度测量，绝对码进行高精度测量。采用增量方式采集莫尔条纹的高速性，解决高精度绝对位置采集的低速性，实现宏微复合的高速与高精度的测量。实验证明,高精度低速绝对位置测量过程中测量精度可达0.6 m，在测量中使用新型高速与低速的变速切换测量方式，综合测量速度最高可以达到2 m/s。
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| 关 键 词： | 绝对光栅尺 宏微复合 速度切换 精密 |
Design and research of precise macro/micro combined absolute optical encoder |
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| Fan Zhaolong;Wang Han;Liu Qiang;Chen Xindu;Zheng Junwei;Liang Feng.Design and research of precise macro/micro combined absolute optical encoder[J].Journal of Applied Optics,2015,36(2):287-293. |
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| Authors: | Fan Zhaolong;Wang Han;Liu Qiang;Chen Xindu;Zheng Junwei;Liang Feng |
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| Institution: | 1.Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China |
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| Abstract: | Through studying the theory of absolute optical encoder, we designed a macro/micro switch measurement . We used the incremental code for low precision measurement ,and the absolute code for high-precision measurement. The incremental acquisition method was used to acquire Moir fringe at a high rate of speed, which could solve the problem of low velocity when using precise absolute optical encoder, and implemented high-speed and high-precision measurement that was a combination of macro and micro. Experiment proves that the precision of high-precision low-speed measurement of absolute position can be up to 0.6 m, the used new-type model of high/low velocity switch measurement can make the comprehensive measurement speed up to 2 m/s. |
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