Monte Carlo correction programme for PC

A Monte Carlo correction program for quantitative microanalysis on PC computer is introduced in this paper. The elastic scattering is described by the screened Rutherford cross section. Instead of computing the energy loss according to the actual path between two scatterings we have defined the Bethe inelastic cross section determined by the Bethe-slowing-down approximation. It is assumed that it causes no angular departure of the scattered electron. In the second model we took into account the angular dependence of inelastic scattering assuming that the primary electron interacts with quasi-free atom electrons. On the basis of these two models analytical Monte Carlo programmes were developed and experimentally tested on some oxide glass. Our results are fully comparable to those obtained by ten world microprobe laboratories using classical ZAF correction or Bence-Albee methods. We have found that introducing angular part of the inelastic cross section analytical results did not significantly change. All of our results were carried out for bulk specimens but extending it to layers is under the development.