| 准分子激光扫描消融淀积大尺寸超导薄膜 |
| |
| 引用本文： | 宋文栋,安承武,陆冬生,范永昌,李再光,黄景清,钟红海,赵兴荣,麦志洪,周方桥,郭青蔚,李月南,华志强.准分子激光扫描消融淀积大尺寸超导薄膜[J].物理学报,1993,42(10):1674-1679. |
| |
| 作者姓名： | 宋文栋 安承武 陆冬生 范永昌 李再光 黄景清 钟红海 赵兴荣 麦志洪 周方桥 郭青蔚 李月南 华志强 |
| |
| 作者单位： | (1)北京有色金属研究总院超导材料研究中心,北京100088; (2)华中理工大学光电子工程系,武汉430074; (3)华中理工大学激光技术国家重点实验室,武汉430074; (4)中国广州分析测试中心,广州510070 |
| |
| 摘 要： | 利用我们设计的一套光学变换传输系统实现了激光束在超导靶上一定范围内扫描消融来淀积高Tc超导薄膜。实验表明用这种激光扫描消融方法可使大尺寸超导薄膜的厚度均匀性得到较大的改善。我们采用激光扫描半径为9mm在12mm×33mm的Y-ZrO2基片上淀积出零电阻温度Tc≥90K,临界电流密度Jc(零磁场,77K)≥1×106A/cm2,薄膜c轴择优取向,厚度均匀性较好的YBa
关键词：
|
| 关 键 词： | 激光淀积 超导膜 薄膜 超导体 |
| 收稿时间： | 1/8/1993 12:00:00 AM |
DEPOSITION OF LARGE AREA SUPERCONDUCTING FILMS BY EXCIMER LASER SCANNING ABLATION |
| |
| SONG WEN-DONG,AN CHENG-WU,LU DONG-SHENG,FAN YONG-CHANG,LI ZAI-GUANG,HUANG JING-QING,ZHONG HONG-HAI,ZHAO XING-RONG,MAI ZHI-HONG,ZHOU FANG-QIAO,GUO QING-WEI,LI YUE-NAN and HUA ZHI-QIANG.DEPOSITION OF LARGE AREA SUPERCONDUCTING FILMS BY EXCIMER LASER SCANNING ABLATION[J].Acta Physica Sinica,1993,42(10):1674-1679. |
| |
| Authors: | SONG WEN-DONG AN CHENG-WU LU DONG-SHENG FAN YONG-CHANG LI ZAI-GUANG HUANG JING-QING ZHONG HONG-HAI ZHAO XING-RONG MAI ZHI-HONG ZHOU FANG-QIAO GUO QING-WEI LI YUE-NAN and HUA ZHI-QIANG |
| |
| Abstract: | Using a special optical transmission system, excimer laser beam can scan on the superconducting target, scanning laser beam ablates the target resulting in deposition of superconducting films. The thickness uniformity of large area superconducting films can be improved by this method. The superconducting films on 12mm×33mm Y-ZrO2 substrates show good thickness uniformity, zero resistance temperature Tc≥90K, critical current density at 77K and zero field Jc≥l×106A/cm2. |
| |
| Keywords: | |
| 本文献已被 CNKI 维普 等数据库收录！ |
| 点击此处可从《物理学报》浏览原始摘要信息 |
| 点击此处可从《物理学报》下载免费的PDF全文 |
|
