| 相干滤波成像系统测量光学元件表面疵病 |
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| 引用本文： | 沈卫星.相干滤波成像系统测量光学元件表面疵病[J].光学技术,2000,26(4):361-362,365. |
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| 作者姓名： | 沈卫星 |
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| 作者单位： | 中国科学院,上海光学精密机械研究所,上海,201800 |
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| 摘 要： | 本文利用相干高通滤波成像系统对光学元件表面疵病进行了测量 ,提出了等效疵病面积的概念及计算公式 ,由等效疵病面积可计算出与 GB1185 - 89对应的疵病等级 J。实验装置的分辨率为 10μm,并具有可靠的表面疵病等级评价
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| 关 键 词： | 表面疵病 相干成像系统 等效疵病面积 疵病等级 |
Surface defects of the optical elements measured by the coherent filter imaging system |
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| SHEN Wei-xing.Surface defects of the optical elements measured by the coherent filter imaging system[J].Optical Technique,2000,26(4):361-362,365. |
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| Authors: | SHEN Wei-xing |
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| Abstract: | It is discussed to measure surface defects of the optical elements using the coherent filter imaging system. The conception and the calculation formula of the equivalent defects area are put forward. The equivalent defects area calculates the defect grades in the criteria GB1185 89. The experimental setting has 10μm resolving power and the credible defect grades evaluated. |
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| Keywords: | surface defects coherent filter equivalent defects area defect grades |
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