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The Interaction of Extended Defects as the Origin of Step Bunching in Epitaxial III–V Layers on Vicinal Si(001) Substrates |
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| Authors: | Michael Niehle Jean-Baptiste Rodriguez Laurent Cerutti Eric Tourni Achim Trampert |
| Institution: | Michael Niehle,Jean-Baptiste Rodriguez,Laurent Cerutti,Eric Tournié,Achim Trampert |
| Abstract: | |
| Keywords: | epitaxial growth extended defects semiconductor heterostructures step bunching |