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X-ray induced fluorescence spectrometry at grazing incidence for quantitative surface and layer analysis
Authors:U. Weisbrod   R. Gutschke   J. Knoth  H. Schwenke
Affiliation:(1) GKSS Forschungszentrum, Postfach 1160, W-2054 Geesthacht, Federal Republic of Germany
Abstract:Summary Single layers and layer systems on diverse substrates were measured by Total Reflection X-Ray Fluorescence (TXRF) spectrometry. The angular dependence of the fluorescence intensities at grazing incidence allows the elemental composition, density and thickness of the layers to be evaluated using model calculations.
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