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Patterning of gold nano-octahedra using electron irradiation combined with thermal treatment and post-cleaning process
Authors:Yong?Nam?Kim  Jong?Min?Kum  Hyeok?Moo?Lee  Email author" target="_blank">Sung?Oh?ChoEmail author
Institution:(1) Department of Nuclear and Quantum Engineering, Korea Advanced Institute of Science and Technology (KAIST), 373-1 Guseong, Yuseong, Daejeon, 305-701, Republic of Korea;(2) Research Division for Industry & Environment, Korea Atomic Energy Research Institute (KAERI), 1266 Sinjeong-dong, Jeongeup-si, Jeollabuk-do, 580-185, Republic of Korea;
Abstract:A novel approach to pattern nanocrystalline gold (Au) octahedra is presented based on electron irradiation combined with thermal treatment and post-cleaning process using HAuCl4-loaded poly(styrene-b-2-vinyl pyridine) (PS-b-P2VP) block copolymer (BCP) as a precursor material. The BCP tends to cross-link under electron irradiation, and thus a patterned film can be prepared by selectively irradiating an electron beam onto a precursor film using a shadow mask. A post-thermal treatment leads to the formation of crystalline Au nano-octahedra inside the patterned film with a help of the BCP acting as a capping agent. Subsequently, the BCP can be removed by O2 plasma etching combined with oxidative degradation, with the Au nanoparticles remaining. As a result, a patterned film consisting of high-purity nanocrystalline Au octahedra is fabricated. The sizes of the Au octahedral nanoparticles can be readily controlled from 49 to 101 nm by changing the thickness of the precursor film. The patterned Au nano-octahedra films exhibit excellent surface-enhanced Raman scattering behavior with the maximum enhancement factor of ~106.
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