One-dimensional photonic crystal fabricated by the photochemical etching of silicon |
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| Authors: | E. V. Astrova V. A. Tolmachev G. V. Fedulova V. A. Melnikov T. S. Perova |
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| Affiliation: | (1) School of Engineering and Applied Science, Harvard University, Oxford St 9, 02138 Cambridge, USA;; |
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| Abstract: | The formation of periodic wall arrays on an n-type (100) Si substrate with V-shaped seed grooves on the surface was investigated. The influence of silicon sidewall roughness on the optical properties of onedimensional (1D) of photonic crystals obtained on the basis of the arrays was studied. The reflection spectra of the 1D photonic crystals exhibit a high modulation level of up to 95% and photonic band gaps of a high order that are in good agreement with calculations over a wide spectral range (1.5—15 μm). |
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