Comparison of the adhesion forces in single and double-layer coatings on the MEMS surfaces by JKR and DMT models

In many medical and industrial applications, some strategies are needed to control the adhesion forces between the materials, because surface forces can activate or hinder the function of the device. All actual surfaces present some levels of roughness and the contact between two surfaces is transferred by the asperities on the surfaces. The force of the adhesion, which depends on the operating situations, can be influenced by the contact region. The aim of the present study is to predict the adhesion force in MEMS surfaces using the JKR and DMT models. The surfaces of the coating material in this research consisted of the single-layer coating of Gold and Silver, and the double-layer coating of TiO₂/Gold and TiO₂/Silver on the silicon (100) substrates. The depositing was done by the thermal evaporation method. The results showed that the double-layer coating developed by the new deposition method helped the reduction of the adhesion forces between the probe tip and the specimen surface. The predicted adhesion forces between the probe and the specimens with DMT and JKR models were compared with the experimental results. For all specimens, the simulated data by applying the JKR theory were in a good agreement with the adhesion force experimental values.