基于二维振镜的多光谱集成靶标设计及应用

为了提高基于二维振镜光轴平行性检测方法的检测精度，简化测量操作步骤，设计了一种基于二维振镜扫描系统的多光谱集成靶标。通过多光谱集成靶板与LED照明光源结合，解决一靶专用中需要频繁更换、反复调校靶板及光源的问题。利用二维振镜进行十字分划中心对准，提高CCD检测方法的测量精度；采用像差优化的卡塞格林准直系统，改善十字分划成像质量。通过光轴平行性检测实验，多光谱集成靶标校准精度达到了0.10 mard，该精度满足多光谱光电系统光轴平行性高精度和自动化检测的要求。

Multi-spectral target design and application based on two-dimensional galvanometer

In order to improve detection precision based on optical axis parallelism of two-dimensional galvanometer and simplify measurement procedure, a multi-spectral integrated target based on two-dimensional galvanometer scanning system is designed. Through integration of multi-spectral target plate and LED lighting source, problems of frequent replacement, repeated adjustment of target plate and light source in a special target are solved. Centering accuracy of CCD detection method is improved by using two-dimensional galvanometer, and Cassegrain collimation system with optimized aberration is used to improve quality of cross-sectional imaging. With optical axis parallelism test, calibration accuracy of multi-spectral integrated target reaches 0.10mard, which meets requirements of high precision and automatic detection of optical axis parallelism of multi-spectral opto-electronic systems.