Energy dispersive analysis of X-ray radiation from the inhomogeneous surface layer

The intensities of theK -line of phosphorus as a function of the energy of primary electron beam and of the change in take-off angle were measured on the iron sample with implanted phosphorus by means of the EDS analysis in the scanning electron microscope. The observed dependences are confronted with model conception of the concentration distribution of the implanted element in the iron. The possibility of analysing the element composition in the region smaller than the excited volume is shown.Dedicated to Academician Vladimír Hajko on the occasion of his 65th birthday.