数字式激光平面干涉仪校准规范介绍

数字式激光平面干涉仪是用于测量光学元件面形和无焦光学系统波像差的光学仪器。为了统一数字式激光平面干涉仪测量量值，保证其测量结果的准确性和溯源性，编写数字式激光平面干涉仪校准规范。简要介绍了数字式激光平面干涉仪校准规范的构成，被校仪器的技术指标和校准方法等。

Explanation of calibration specification for digital laser plane interferometer

Digital laser plane interferometer is used to measure the surface of optical components and the wavefront aberration of non-confocal optical system. In order to unify digital laser interferometer measurement values,and guarantee the accuracy and traceability of the measured results, the digital laser interferometer calibration standard was laid down. The constitution of the calibration specification for digital laser plane interferometer is introduced. The specifications for the instruments under test, the main calibration parameters and the calibration method are described.