A single-mode KrF laser

Single-mode operation of a KrF laser oscillator has been achieved for the first time. The laser medium is pumped by an electron beam which allows excitation for a much longer duration than with discharge pumping. The long excitation time, together with the use of a short oscillator cavity with a low single-pass gain, allows many roundtrips before saturation is reached. This makes line-narrowing easier and single-mode operation has been achieved using only two intracavity etalons.Technical Research Centre of Finland, Helsinki, Finland