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直线度误差的光电非接触测量方法
引用本文:张国玉,安志勇,姜会林,李成志,高玉军.直线度误差的光电非接触测量方法[J].光学技术,1999(1):geMap1.
作者姓名:张国玉  安志勇  姜会林  李成志  高玉军
作者单位:1. 长春光学精密机械学院,长春,130022
2. 中国科学院长春光学精密机械研究所,长春,130022
摘    要:基于光电检测技术,利用回转和轴向进给伺服系统,通过激光扫描检测系统测量刀口尺与被测零件素线之间的间隙,实现了对直线度误差的非接触自动测量。详细论述了直线度误差的测量方法和光电检测系统,通过实验对系统的测量精度进行了验证。

关 键 词:直线度误差  光电检测  非接触测量  激光扫描  测量方法

Optoelectronic non-contact measuring method for straightness error
ZHANG Guoyu,AN Zhiyong,JIANG Huili,LI Chengzhi,GAO Yujun.Optoelectronic non-contact measuring method for straightness error[J].Optical Technique,1999(1):geMap1.
Authors:ZHANG Guoyu  AN Zhiyong  JIANG Huili  LI Chengzhi  GAO Yujun
Abstract:Based on the optoelectronic inspecting technology, the chinks between knife edge and the generatrices of measured part were measured by the laser scanned inspecting system and using the rotating and axial feed servo systems, and the non contact automatic measurement of straightness error was realized. The measuring method for straightness error and the optoelectronic inspecting system were described in detail, the measuring accuracy of the system was verified by experiments.
Keywords:straightness error  optoelectronic inspecting  non  contact measurement  laser  scanned  measuring method
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