| INFLUENCE OF PLASMA DENSITY ON NUCLEATED DENSITY OF DIAMOND |
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| 作者姓名： | ZHAN Ru-Juan ZHU Xiao-Dong CHEN Ji-Fong |
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| 基金项目： | This work was supported by the National Natural Science Foundation of China |
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| 摘 要： | The predeposition method for mereasing CH_4 concentration ininitial stage of diamond synthesis by plasma chemical vapor deposition.isused to enhance nucleated density of diamond films.The plasma parametersare diagnosed in situ using the Langmuir double probe.The relation betweenplasma ion density and nucleated densitv of diamond is revealed Increasingplasma ion density results in enhancement of nucleated density of diamondobviously
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INFLUENCE OF PLASMA DENSITY ON NUCLEATED DENSITY OF DIAMOND |
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| ZHAN Ru-Juan ZHU Xiao-Dong,CHEN Ji-Fong.INFLUENCE OF PLASMA DENSITY ON NUCLEATED DENSITY OF DIAMOND[J].Journal of Natural Gas Chemistry,1995(4). |
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| Authors: | ZHAN Ru-Juan ZHU Xiao-Dong CHEN Ji-Fong |
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| Institution: | ZHAN Ru-Juan ZHU Xiao-Dong CHEN Ji-FongDepartment of Modem Physics. Structure Research Laboratory University of Science and Technology of China Hefei Anhui 230026 |
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| Abstract: | The predeposition method for increasing CH4 concentration in initial stage of diamond synthesis by plasma chemical vapor deposition, is used to enhance nucleated density of diamond films. The plasma parameters are diagnosed in using the Langmuir double probe. The relation between plasma ion density and nucleated density of diamond is revealed Increasing plasma ion density results in enhancement of nucleated density of diamond obviously. |
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| Keywords: | plasma density nucleated density predeposition |
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