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On a non-thermal atmospheric pressure plasma jet used for the deposition of silicon-organic films |
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| Authors: | Jan Schäfer Florian Sigeneger Rüdiger Foest Detlef Loffhagen Klaus-Dieter Weltmann |
| Affiliation: | 1.Leibniz Institute for Plasma Science and Technology e.V.,Greifswald,Germany |
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