反射镜补偿检验

在光学加工中,反射镜可以很好地补偿待检镜,解决加工中的一些难题。通过三级像差理论求解反射镜补偿检验二次曲面的初始结构参量,令球差系数∑S1=0,补偿镜e21可选择球面或椭球面,推导出补偿镜和待检镜之间关系的表示式e。21=0、0.1、0.2、0.3、0.4,按公式画出e22/α~β,αr02/r01~β的曲线图,从中确定β∝α,e21,e22,r01,r02,d12的对应关系,解出补偿检验的初始结构参量,分析补偿镜放置待检镜曲率中心前α>0,α>1和后α<0、β≥0,β≤0对应待检镜的e22各种求解。分析看出:这包括了补偿检验的全部功能,对凸和凹的二次曲面都可以进行补偿检验,其中有以前提出的解,也有以前没有发现的解,对补偿检验的全面分析是非常有益的。

Compensating test of the Reflective Mirror

The mirror can compensate the tested mirror very well in the optical manufacturing, which with some difficult problems can be solved in the manufacturing. Based on the third-order aberration theory the initial configuration parameters of the mirror compensator in testing the conicoid are solved in theory, making spherical aberration coefficient ∑S1=0, and the relations between the compensating mirror and the tested mirror are given, with the surface of compensator chosen as sphere or ellipsoid. Setting e21=0,0.1,0.2,0.3,0.4, the graph of e22/α～β, α r01/r02～β is plotted based on the equations, the relations of β and α, e21, e22, r01, r02, d12 and the initial configuration parameters of the compensating mirror are also gotten. There are two cases about the compensator: one is α>0, α>1, and the compensator is set in front of the curvature center of the tested mirror; the other is α0, β=0, β<0. By analysing in detail, it is found that both the convex and the concave conicoid mirrors can be compensated and tested by mirror compensators, all cases of compensations and tests are included, some have been brought forward, but others have not, which benifits the general analysis of the compensation and the test.