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飞秒激光辐射诱导金属表面微纳结构研究
引用本文:周明,袁冬青,李健,范晓萌,戴娟,沈坚,王辉,李保家,蔡兰.飞秒激光辐射诱导金属表面微纳结构研究[J].光谱学与光谱分析,2009,29(6):1454-1458.
作者姓名:周明  袁冬青  李健  范晓萌  戴娟  沈坚  王辉  李保家  蔡兰
作者单位:江苏大学光子制造科学技术中心,江苏 镇江 212013
基金项目:全国百篇优秀博士论文基金,国家高技术研究发展计划(863计划),国家自然科学基金面上项目,江苏省高校自然科学基础研究重大项目 
摘    要:通过1 kHz的飞秒脉冲(脉宽130 fs,中心波长800 nm)对厚度为60 μm的不锈钢65Mn表面进行飞秒微加工,通过拟合得到65Mn的消融阈值为0.5 J·cm-2。研究了飞秒激光作用下表面形成的多种微结构,其中包括纳米孔及纳米柱状物。同时讨论了激光能量和作用脉冲个数对微结构形成的影响。随着周期波纹结构的形成,发现在各种能量和脉冲个数条件下,周期结构的周期约为入射脉冲的波长。相同的激光功率下,在不同加工速度和加工次数下对不锈钢进行表面微加工,得到了规则的圆孔阵列结构。

关 键 词:飞秒激光  65Mn  微加工  表面形貌  周期结构  
收稿时间:2008/8/10

Micro-and Nano-Structures on Metal Induced by Femtosecond Laser Radiation
ZHOU Ming,YUAN Dong-qing,LI Jian,FAN Xiao-meng,DAI Juan,SHEN Jian,WANG Hui,LI Bao-jia,CAI Lan.Micro-and Nano-Structures on Metal Induced by Femtosecond Laser Radiation[J].Spectroscopy and Spectral Analysis,2009,29(6):1454-1458.
Authors:ZHOU Ming  YUAN Dong-qing  LI Jian  FAN Xiao-meng  DAI Juan  SHEN Jian  WANG Hui  LI Bao-jia  CAI Lan
Institution:Center for Photo Manufacturing Science and Technology, Jiangsu University, Zhenjiang 212013, China
Abstract:In the present study the authors performed surface treatment of stainless steel 65Mn (the thickness is 60 μm) by femtosecond laser (pulse duration 148 fs, wavelength 775 nm). The single-pulse threshold could be obtained directly to be about 0.2 J·cm-2. The authors found that the femtosecond laser produced a large number of micro-structures such as nano-pores and nano-protrusions. Then the authors discussed the influence of pulse power and the number of shots on the formed surface structures. The authors found that with the change in the power and the number of pulses, the period of multiple parallel grooved surface patterns remained unchanged, which is about on the sub-micron level. Finally the authors processed the array of holes and the lines with different speed and number of pulses.
Keywords:65Mn
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