| 脉冲激光烧蚀制备纳米硅晶粒成核生长的热力学条件研究 |
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| 引用本文： | 秦爱丽,褚立志,邓泽超,丁学成,王英龙.脉冲激光烧蚀制备纳米硅晶粒成核生长的热力学条件研究[J].人工晶体学报,2017,46(12):2343-2347. |
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| 作者姓名： | 秦爱丽 褚立志 邓泽超 丁学成 王英龙 |
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| 作者单位： | 河北大学物理科学与技术学院,保定 071002;河北工程大学数理科学与工程学院,邯郸 056038;河北大学物理科学与技术学院,保定,071002 |
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| 基金项目： | 国家自然科学基金(11504078);河北省自然科学基金(A2015201166);河北省研究生创新资助项目(CXZZBS2017024) |
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| 摘 要： | 文中利用蒙特卡洛方法,引入成核生长模型,研究了纳米硅晶粒成核生长过程.结合宏观阻力模型,计算了纳米硅成核和生长所对应的过饱和度范围.结果显示,衬底的二次溅射,造成成核次数增多,生成小尺寸纳米晶粒的数量增加;晶粒成核过程和生长过程所需要的过饱和度范围不同,过饱和度较大(>2600)时成核次数多生长次数少;而过饱和度在250～2600时生长次数多成核次数少.
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| 关 键 词： | 蒙特卡洛方法 阻力模型 成核和生长 |
Thermodynamic Conditions of the Nucleation and Growth of Si Nanoparticles Prepared by Pulsed Laser Ablation |
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| QIN Ai-li,CHU Li-zhi,DENG Ze-chao,DING Xue-cheng,WANG Ying-long.Thermodynamic Conditions of the Nucleation and Growth of Si Nanoparticles Prepared by Pulsed Laser Ablation[J].Journal of Synthetic Crystals,2017,46(12):2343-2347. |
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| Authors: | QIN Ai-li CHU Li-zhi DENG Ze-chao DING Xue-cheng WANG Ying-long |
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| Abstract: | Monte Carlo method was used to simulate silicon nanoparticles produced by pulsed laser ablation in this paper .Combined with the drag force model , the degree of supersaturation suitable for the nucleation and growth was calculated .The results show that the substrate of the secondary sputter causing the nucleation times increase , which lead to the number of small size grains increase; the range of the supersaturation degree suitable for nucleation and growth is different , when the degree of supersaturation is larger ( >2600 ) the nucleation times is more and the growth times is less; when the degree of supersaturation is smaller (250-2600) the growth times is more and the nucleation times is less . |
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