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Parallel Plate Interferometer with a Reflecting Mirror for Measuring Angular Displacement
Authors:Defeng Zheng  Xiangzhao Wang  Osami Sasaki
Affiliation:(1) Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, 201800, China;(2) Graduate School of Chinese Academy of Sciences, Beijing, 100039, China;(3) Faculty of Engineering, Niigata University, Niigata 950-2181, Japan
Abstract:
A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in the plane-parallel plate, which provides high sensitivity of the phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10−8 rad.
Keywords:angular displacement  interference measurement  plane-parallel plate  laser diode  phase measurement
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