原子力与光子扫描隧道组合显微镜

介绍了超高分辨光于扫描隧遭显微镜（PSTM）的计冗历程，为解决第一代（单光束照明）光千扫捕隧逼显傲镜中存在人为假象和样品光学图像与形貌图像难于分离两个难题，用“对称双光束照明方法消假象，用原子力与光子扫描隧道组合显微镜（AF／PSTM）图像分解方法分离样品光学透过率、折射率与形貌图像。研制成功新一代原子力与光子扫描隧道组合显微镜（AF／PSTM）样机。该样机在一次扫描中已获得两幅原子力显微镜图像（形貌与相位）和两幅光学图像（透过率和折射率），有效地减少了假象，分解了样品光学折射率、透过率与形貌图像。

Photon Scanning Tunneling Microscope Combined with Atomic Force Microscope

The development course of Photon Scanning Tunneling Microscopy (PSTM) is introduced. There are two difficult problems in first generation (with single beam) PSTM, which are the spurious image and the mixture of optical image with topography of sample in PSTM imaging. With the method of π symmetry two beams lighting to eliminate the optical spurious image, and the method of AF/ PSTM separating image was used to separate the optical image from topography image of sample. The patent instrument named AF/PSTM (atomic force/photon scanning tunneling microscope) have been successfully developed, with which two AFM images (topography and phase images) and two PSTM images (transmissivity and refractive index images) of sample in once scanning are obtained. The AF/PSTM can limit the spurious effects due to non-isotropic illumination with single beam and can separate the refractive index image and transmissivity image from topography image.