| 用掩蔽注入法研究钛注入H13钢的耐磨性 |
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| 引用本文： | 杨建华,张通和. 用掩蔽注入法研究钛注入H13钢的耐磨性[J]. 物理学报, 2004, 53(11): 3823-3828 |
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| 作者姓名： | 杨建华 张通和 |
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| 作者单位： | (1)北京师范大学射线束和材料工程教育部重点实验室,北京 100875; (2)南通工学院物理部,南通 226007；北京师范大学射线束和材料工程教育部重点实验室,北京 100875 |
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| 基金项目： | 国家自然科学基金（批准号：59671051）、江苏省教育厅自然科学基金(批准号：02KJD490 001)及南通工学院基金(批准号：200347)资助的课题. |
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| 摘 要： | 采用由金属蒸汽真空弧离子源引出的强束流钛、碳离子对H13钢进行表面改性研究.钛和碳离子注入剂量分别为3×1017和1×1017cm-2,引出电压分别为48和30kV，平均束流密度分别为47和20μA·cm-2.为了保持相同的摩擦磨损实验条件，注 入过程中采用掩蔽注入技术.摩擦磨损实验结果表明，钛离子注入H13钢提高了其耐磨性，并大幅度降低其摩擦系数.利用卢瑟福背散射谱测量了离子注入表面的成分，并采用逐层递推 法得出了钛在H13钢中的浓度深度分布，借助掠面x射线衍射考察了注入表面的相结构.关键词：钛离子注入金属蒸汽真空弧卢瑟福背散射掠面x射线衍射
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| 关 键 词： | 钛离子注入 金属蒸汽真空弧 卢瑟福背散射 掠面x射线衍射 |
| 收稿时间： | 2003-07-24 |
| 修稿时间： | 2004-03-05 |
Wear resistance of Ti-implanted H13 steel using covering implantation technology |
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| Yang Jian-Hua,Zhang Tong-He. Wear resistance of Ti-implanted H13 steel using covering implantation technology[J]. Acta Physica Sinica, 2004, 53(11): 3823-3828 |
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| Authors: | Yang Jian-Hua Zhang Tong-He |
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| Abstract: | Ti and C ions extracted from a metal vapor vacuum arc ion source were implanted into H13 steel, with an implantation dose of 3×1017cm-2,an extractio n acceleration 48kV,and an average ion beam flux between 20 and 47μAcm-2. Rutherf ord backscattering (RBS) spectrum was used to measure the Ti concentration depth profile in H13 steel after Ti ion implantation. The surface microstructure observation was carried out using glancing x ray diffraction analysis(GXRD). Wear test results showed that the wear rate of the implanted layer dropped by about 40% for Ti ，C dual implantation. In addition, the Ti implantation was found to significant ly reduce the friction coefficient of steel H13. The wear mechanisms of the impl anted layer were discussed by results of RBS and GXRD. |
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| Keywords: | Ti ion implantation metal vapor vacuum arc RBS GXRD |
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