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Crystallization of amorphous germanium films |
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| Authors: | N. N. Sirota W. A. Denis L. S. Unyarkha |
| Abstract: | Kinetics of isothermal crystallization has been studied in the temperature range from 375 to 525°C. The kinetic curves are obtained and the rate of isothermal transformation of amorphous films into crystalline ones has been determined. Using experimentally determined kinetic curves the stability diagram of the amorphous films has been plotted in the temperature range from 400 to 525°C. The value of effective activation energy has been defined. |
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