Fluidic applications for atomic force microscopy (AFM) with microcantilever sensors |
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Authors: | Seonghwan Kim Kenneth D Kihm Thomas Thundat |
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Institution: | (1) Nanoscale Science and Devices Group, Biosciences Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA;(2) Department of Mechanical, Aerospace and Biomedical Engineering, University of Tennessee, Knoxville, TN 37996, USA;(3) Department of Physics, University of Tennessee, Knoxville, TN 37996, USA |
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Abstract: | This review presents the fundamentals of atomic force microscopy (AFM) with microcantilever probes and their use as fluidic
sensors for the measurement of micro/nanoscale transport properties. Over the last two decades, AFM has been widely used for,
among other purposes, nanoscale topography, nanomechanical characterization, and intermolecular force spectroscopy. Furthermore,
a microcantilever, an essential part of AFM, has been modified and exploited as a mechanical transducer for various sensing
applications. Among many prospective uses, there appears to be great potential for micro/nanoscale sensing of fluid density
and viscosity (Sect. 3.1), temperature (Sect. 3.2), pressure (Sect. 3.3), and flow velocity (Sect. 3.4). These micro/nanomechanical measurement techniques are expected to complement the advanced optical and electrical measurement
techniques currently employed for micro/nanoscale fluidic sensors and also to fill the gap between microscale and nanoscale
fluidic transport property measurements. |
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