Investigating semiconductor layered systems of photonics |
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| Authors: | D. V. Abramov K. S. Khor’kov S. V. Kutrovskaya M. A. A. Noman V. G. Prokoshev |
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| Affiliation: | 1. Vladimir State University, Vladimir, 600000, Russia
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| Abstract: | The structure of a heterostructures-based semiconductor laser is experimentally investigated by complex means involving systems of scanning electron microscopy, scanning probe microscopy, and Raman spectroscopy. The possibilities of high-resolution microscopy for diagnostics of layered microelectronic systems are demonstrated. |
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