| 基于改进Stoilov算法光学元件瑕疵检测 |
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| 引用本文： | 方关明,曹益平.基于改进Stoilov算法光学元件瑕疵检测[J].强激光与粒子束,2010,22(1). |
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| 作者姓名： | 方关明 曹益平 |
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| 作者单位： | 四川大学 电子信息学院, 成都 610064 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，四川省科技攻关项目，四川省学术与技术带头人培养基金 |
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| 摘 要： | 提出一种基于统计逼近的改进Stoilov算法,可以除去光学元件检测中展开相位时遇到的奇异点和超大误差,提高测量精度。通过重构瑕疵表面3维形貌,并对规则几何形状光学元件表面进行拟合,建立光学元件瑕疵检测理论模型,可以有效对光学元件表面瑕疵进行检测。把该算法和模型运用到光学平晶瑕疵检测中,测出光学平晶的微小划痕深度为40nm。
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| 关 键 词： | 光学元件 瑕疵检测 Stoilov算法 相移干涉 统计逼近 |
| 收稿时间： | 1900-01-01; |
Optical element defect detection based on improved Stoilov algorithm |
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| Fang Guanming,Cao Yiping.Optical element defect detection based on improved Stoilov algorithm[J].High Power Laser and Particle Beams,2010,22(1). |
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| Authors: | Fang Guanming Cao Yiping |
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| Institution: | School of Electronics and Information Engineering, Sichuan University, Chengdu 610064, China |
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| Abstract: | An improved Stoilov algorithm was proposed based on statistical approach, which can remove singularities and large errors to improve measure precision. The optical element defect detection model was constructed by fitting the surface of optical element as well as reconstructing the surface of defect element. The defect on an optical flat was detected with this method and model. The measured depth of scratch is 40 nm. |
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| Keywords: | optical element defect detection Stoilov algorithm phase shifting interferometry statistical approach |
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