Reflective silicon binary diffraction grating for visible wavelengths |
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| Authors: | Peng Zhen Fattal David A Faraon Andrei Fiorentino Marco Li Jingjing Beausoleil Raymond G |
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| Institution: | Hewlett-Packard Laboratories, 1501 Page Mill Road, Palo Alto, California 94304, USA. |
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| Abstract: | We introduce a device based on subwavelength resonant grating technology. Using a single lithography step we built a reflective binary grating that mimics the functionality of a blazed diffraction grating in a flat geometry. We have also demonstrated that efficient subwavelength resonant devices for visible wavelengths can be built using silicon. |
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