ITO成分分析标准物质的研制

研制3种掺杂铁、铜、铅、锌、钙、镁金属元素的氧化铟锡(ITO)成分分析标准物质。采用溶胶凝胶和共沉淀相结合的方法制备标准物质候选物,用电感耦合等离子体发射光谱法对其进行均匀性、稳定性检验及定值分析。采用8家具有资质的实验室对研制的标准物质进行协作定值,对定值结果的不确定度进行评定。结果表明:研制的ITO成分分析标准物质具有良好的均匀性和稳定性,3种标准物质中氧化锡含量在1%~10%之间,相对扩展不确定度为0.7%~6.6%(k=2);6种掺杂元素含量在0.05%~0.30%之间,相对扩展不确定度为3.4%~11%(k=2)。

Preparation of Reference Materials of Indium Tin Oxide for Elements Analysis

Three kinds of certified reference materials of indium tin oxide(ITO) were prepared, which were doped with six elements of Fe, Cu, Pb, Zn, Ca, Mg. Reference material candidate were developed by sol-gel and co-precipitation methods. Uniformity, stability and value definating were carried out by inductively coupled plasma optical emission spectrometer(ICP–OES). The values of reference materials were determined by eight qualified laboratories. Theresults showed that the uniformity and stability were good. The content of tin dioxide was 1%–10% with the relative expanded uncertainty of 0.7%–6.6%(k=2). The content of six kinds of doping elements were in the range of 0.05%–0.30% with the relative expanded uncertainty ranged from 3.4% to 11%(k=2).