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Mechanical and dielectric properties of pure-silica-zeolite low-k materials |
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| Authors: | Li Zijian Johnson Mark C Sun Minwei Ryan E Todd Earl David J Maichen Wolfgang Martin Jeremy I Li Shuang Lew Christopher M Wang Junlan Deem Michael W Davis Mark E Yan Yushan |
| Affiliation: | Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA. |
| Abstract: | |
| Keywords: | mechanical properties porous materials silicates thin films zeolites |
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