Effects of Cathode and Anode on Deposition of Trimethylsilane in Glow Discharge

DC cathodic polymerization of trimethylsilane (TMS) was carried out in plasma reactors with and without using anode assembly. In DC cathodic polymerization, the TMS plasma polymers are mainly deposited on the cathode (substrate) surface. As a result, fast deposition of TMS plasma polymers was easily achieved in DC cathodic polymerization as compared with AF or RF plasma polymerization. DC cathodic polymerization without using anode assembly has its advantageous features that the size and number of substrates (as cathodes) are not restricted by the size and the location of anode assembly. It was found that the maximum deposition rate on the cathode surfaces was obtained without anode assembly. The DC cathodic polymerization of TMS was conducted also in a large volume reactor with multiple cathodes (substrates). The same deposition mechanisms for DC cathodic polymerization with a single cathode also apply to the multiple cathodes. Uniform deposition on each cathode could be obtained with appropriate spacing of multiple cathodes and by adjusting the operational parameters, which are based on the current density and the system pressure.