Pulsed laser deposition of magnetic films by ablation of Co- and Fe-based amorphous alloys |
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| Authors: | AP Caricato M Fernández Z Frait D Fraitova S Luby A Luches E Majkova G Majni R Malych P Mengucci |
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| Institution: | (1) Department of Physics, INFM and University of Lecce, Lecce, 73100, Italy;(2) Institute of Physics, Academy of Sciences CR, Prague, 18221, Czech Republic;(3) Institute of Physics, Slovak Academy of Sciences, Bratislava, 84511, Slovak Republic;(4) Department of Physics and Engineering of Materials and Environment, INFM and University of Ancona, Ancona, 60131, Italy |
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| Abstract: | Magnetic films were prepared by pulsed laser ablation of amorphous magnetic ribbons (composition Co67Cr7Fe4Si8B14, Fe73.5Nb3Cu1Si13.5B9, and Fe40Ni40B20) and permalloy foils (composition FexNi1-x with x=22,50). Depositions were performed in a vacuum of (2–4)×10-5 Pa by KrF excimer laser pulses at fluences of between 2 and 7 J cm2. Films were deposited on oxidized silicon wafers, placed 60–80 mm apart from the target. Films were analyzed by SEM, XRD, RBS, and EDS. Ferromagnetic resonance (FMR) spectra were studied at GHz frequencies. From RBS and EDS measurements it follows that the stoichiometry of the targets is preserved in the films to a large extent. The films deposited from amorphous targets remain amorphous. From FMR studies it follows that Fe and Fe-Ni rich films exhibit properties close to those of bulk alloys, having very low magnetization motion damping parameter ( ) of 7.0–7.8×107 rad/s, which are appropriate for fast magnetic sensors. PACS 79.20.Ds; 75.50.Kj; 75.70.-i |
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