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Scanning tunneling lithography of silicon nanoparticle films
Authors:P. Scheier and K. Sattler
Affiliation:(1) Department of Physics and Astronomy, University of Hawaii at Manoa, 2505 Correa Road, Honolulu, HI 96822, USA
Abstract:Monolayer and bi-layer silicon nanoparticle (SiNP) filmswith wide band gaps (up to 4 eV) have been produced in UHV withnarrow size distributions of particles with 2-4 nm diameters andwere studied using scanning tunneling microscopy (STM) andspectroscopy (STS). The films then were manipulated by applyingdifferent values for the tunneling resistance. Nanoparticlefusion and fission processes allow to shape the particles in thefilms in various ways and to write in white and black on thefilm template.
Keywords:81.16.Nd Nanolithography  36.40.-c Atomic andmolecular clusters  81.16.Ta Atom manipulation  73.22.-fElectronic structure of nanoscale materials: clusters,nanoparticles, nanotubes, and nanocrystals
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