Inelastic scattering of slow electrons in solids

A theory of the inelastic scattering of slow electrons in solids due to excitation of interband transitions is developed. It is shown that both nondirect and direct transitions occur which can be described by a generalization of the formalism used in solid state optics. Experiments with 30–200 eV electrons scattered from Si (111) surfaces with well defined surface structures as determined by low energy electron diffraction confirm the theoretical predictions. They indicate that the inelastic scattering of slow electrons can be understood in terms of the three-dimensional band structure of solids and suggest the use of inelastic low energy electron scattering as a tool for band structure analysis.