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Effect of high-temperature annealing on AIN thin film grown by metalorganic chemical vapor deposition |
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| Authors: | Wang Wei-Ying Jin Peng Liu Gui-Peng Li Wei Liu Bin Liu Xing-Fang Wang Zhan-Guo |
| Institution: | Key Laboratory of Semiconductor Materials Science and Beijing Key Laboratory of Low-dimensional Semiconductor Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China |
| Abstract: | high-temperature annealing, A1N, optical properties |
| Keywords: | high-temperature annealing A1N optical properties |
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