Electron beam formation in an anomalous glow discharge

Scaling parameters that account for the efficient formation of electron beams in sources based on an anomalous glow discharge are considered, and the processes leading to the violation of scaling laws are analyzed. Estimates show that the working pressure range in such sources can be increased significantly. The results obtained can be used to optimize discharge regimes with required electron beam parameters. It is demonstrated that sources with plane-parallel continuous electrodes can operate at pressures as high as 100 Torr (which is one to two orders of magnitude higher than that in similar existing electron beam sources), provided that parasitic spark breakdowns at the insulator near the discharge cathode are suppressed. The sources designed can be used for direct excitation of laser working media or their preionization by soft X-rays.