| 柔性铰链微位移机构在可调谐F-P滤波器中的应用研究 |
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| 引用本文： | 王明明,张连清,李营,张书练,李湘培.柔性铰链微位移机构在可调谐F-P滤波器中的应用研究[J].光学技术,2007,33(3):409-411. |
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| 作者姓名： | 王明明 张连清 李营 张书练 李湘培 |
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| 作者单位： | 1. 清华大学,精密测试技术与仪器国家重点实验室,北京,100084
2. 韩国科学技术研究院,首尔,136791 |
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| 摘 要： | 分析了由于反射镜倾斜导致的可调谐F-P(Fabry-Perot)滤波器失谐。设计了一种柔性铰链式微位移机构,由压电陶瓷驱动,采用平行四连杆机构进行传动导向。采用该机构驱动F-P腔镜扫描克服了直接使用压电陶瓷带来的腔镜倾斜问题。该机构已应用于可调谐F-P滤波器中,输出信号多周期峰值幅度均匀,重复性好。
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| 关 键 词： | 可调谐F-P滤波器 柔性铰链 微位移机构 压电陶瓷致动器 |
| 文章编号： | 1002-1582(2007)03-0409-03 |
| 收稿时间： | 2006/5/22 |
| 修稿时间： | 2006年5月22日 |
Study on application of flexible hinge micro-displacement mechanism in tunable F-P filters |
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| WANG Ming-ming,ZHANG Lian-qing,LI Ying,ZHANG Shu-lian,LEE Sang-bae.Study on application of flexible hinge micro-displacement mechanism in tunable F-P filters[J].Optical Technique,2007,33(3):409-411. |
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| Authors: | WANG Ming-ming ZHANG Lian-qing LI Ying ZHANG Shu-lian LEE Sang-bae |
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| Abstract: | The output signal distortion of tunable F-P filters caused by the F-P cavity mirror tilt was analyzed.Using a parallel linkage flexible hinge as a guide translator,a micro-displacement mechanism which was driven by a piezoelectric actuator was designed.Using the mechanism the F-P filter distortion problem generated by its cavity mirror tilt was solved when the scan mirror was pushed to move by the piezoelectric actuator directly.By this way,the uniformity of peak amplitudes of output by the tunable F-P filter is greatly improved in several periods.The mechanism has been successfully applied to the tunable F-P filter. The experiment shows the repeatability of the tunable F-P filter is remarkably improved. |
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| Keywords: | tunable F-P filters flexible hinge micro-displacement mechanism piezoelectric actuator |
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