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Surface hydrogen detection by low energy He ion scattering spectroscopy |
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| Authors: | Fumiya Shoji Keiichiro Kashihara Kenjiro Oura Teruo Hanawa |
| Affiliation: | Electron Beam Laboratory, Faculty of Engineering, Osaka University, Suita, Osaka 565, Japan |
| Abstract: | Hydrogen adsorbed on a Si(100) surface can be detected by angle-resolved LEIS (low-energy ion scattering spectroscopy) which uses a 4He+ ion beam with incident energies around 1 keV. The scattering peaks from the surface hydrogen are restricted to narrow scattering angles from 0° to 15°, which is in agreement with those expected by the binary elastic collision model. |
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