| 晶体生长过程建模及解耦控制 |
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| 引用本文： | 王庆,姜雷,张婷曼.晶体生长过程建模及解耦控制[J].人工晶体学报,2011,40(5):1353-1357. |
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| 作者姓名： | 王庆 姜雷 张婷曼 |
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| 作者单位： | 西安理工晶体科技有限公司,西安710077;西安理工大学,西安710048;西安理工大学,西安,710048;延安大学西安创新学院,西安,710100 |
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| 基金项目： | 国家科技重大专项(2009ZX02011) |
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| 摘 要： | 晶体生长过程中其直径的控制是通过调节生长速度和热场温度而实现的.控制系统是一个双入双出系统,输入输出之间存在耦合关系.本文采用前馈补偿解耦的方法,实现了单晶炉生长控制中的解耦控制,并通过仿真及实验证明了方法的有效性.
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| 关 键 词： | 单晶炉 双入双出系统 解耦控制 前馈补偿 |
Modeling of Crystal Growth Process and Its Decoupling Control |
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| WANG Qing
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JIANG Lei
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ZHANG Ting-man.Modeling of Crystal Growth Process and Its Decoupling Control[J].Journal of Synthetic Crystals,2011,40(5):1353-1357. |
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| Authors: | WANG Qing JIANG Lei ZHANG Ting-man |
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| Institution: | WANG Qing1,2,JIANG Lei2,ZHANG Ting-man3 (1.Xi'an University of Technology Crystal Growing Technology Co.ltd,Xi'an 710077,China,2.Xi'an University of Technology,Xi'an 710048,3.Xi'an Creation College of Yan'an University,Xi'an 710100,China) |
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| Abstract: | In the process of growing crystal,the crystal diameter was controlled through adjusting the crystal lift rate and the heater temperature.Therefore,the crystal diameter control system is a multiple input multiple output system.Two input variables are the heater temperature and the crystal lift rate respectively.Two output variables are the crystal diameter and the crystal growing rate respectively.The inputs and outputs are mutally coupling.The feedfarward compensation decoupling method is proposed for decou... |
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| Keywords: | single crystal furnace dual input dual output system decoupling control feedforward compensation |
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