准分子激光取样与电感耦合等离子体质谱和光谱联用分析仪器研究进展

将准分子激光剥蚀取样后的产物经由电感耦合等离子质谱与光谱分析，从而获得被激光剥蚀样品的元素与同位素含量信息，是迄今为止适应于表面原位微区分析最为重要的分析科学技术手段之一。基于准分子激光剥蚀取样技术分别与电感耦合等离子体质谱或发射光谱技术联用的分析手段, 已经被广泛应用于地质学、材料学、环境科学，甚至生命科学领域的原位微区分析研究当中, 并且分别体现了各自技术的优势：固体材料表面的原位微区激光剥蚀取样技术既可以获取被分析材料的原位微区信息（满足了需要空间高分辨的微区元素与同位素信息提取的需求），又避免了样品预处理带来的可能污染问题，同时，脉冲宽度为纳秒或飞秒的深紫外准分子激光具有极高的能量密度，用于剥蚀固体材料表面取样产生的热效应较低，引起的化学元素和同位素分馏效应不明显，其剥蚀取样的产物（气溶胶）可以更为接近代表原被剥蚀固体材料表面的化学元素和同位素组成；电感耦合等离子质谱分析和光谱分析技术已被证明可以高质量地提供被分析样品的元素与同位素信息，激光剥蚀取样技术与电感耦合等离子体质谱分析技术联用已经为固体材料表面的原位微区元素和同位素分析，带来了大量可信的科学分析数据，近年来将质谱分析手段与光谱分析手段联用于等离子体分析，并应用于元素和同位素化学分析，利用质谱分析与光谱分析方法各自的优点，优势互补，旨在提高电感耦合等离子质谱和光谱技术的元素和同位素分析精度，有望成为了一种新的分析科学方案。从应用于原位微区微量元素与同位素化学分析的需求出发，介绍了基于准分子激光剥蚀取样技术和电感耦合等离子体质谱与光谱分析技术同步联用的分析技术方案，并对于研发相关分析仪器的进展进行了概括与展望。

Advances in Equipment for Deep Ultra-Violet Excimer Laser Ablation Coupled Plasma Mass and Optical Emission Spectrometry

The sample’s elemental and isotopic content information can be obtained by inductively coupled plasma mass and optical emission spectrometry analysis of excimer laser ablated products. Excimer laser ablation coupled mass and optical emission spectrometry are among the most important analytical techniques suitable for in situ microanalyses. Excimer laser ablation based sampling technique coupled with either ICP mass spectrometry or optical emission spectrometry techniques have witnessed widely applications in geology, materials science, environmental science, and even life science research. The combination of excimer laser ablation sampling technique and plasma analysis techniques fully demonstrates their respective advantages: the former’s in-situ sampling solid surface feature satisfying both the needs of evaluating elemental or isotopic concentration with high space-resolution and avoidance of polluted problem during sample pretreatment, furthermore, high-energy laser of pulse width ranging from nanosecond to femtosecond, low thermal effect resulting from ablation of solid sample surface and leading to less elemental or isotopic fractionation effects in laser ablation products which can fully represent the original elemental or isotopic information in analytes; either ICP mass spectrometry or optical emission spectrometry-based techniques have been applied successfully to investigate elemental or isotopic information in analytes, and the tandem of laser sampling technique with ICP mass technique have already produced various in-situ elemental and isotopic concentrations data in solid surface samples with high quality; simultaneously integrated ICP mass spectrometry with optical emission spectrometry has been recently proposed for chemical analysis in analyte, aiming at improve elemental and isotopic analysis accuracy and precision based on ICP mass and OES techniques. This paper introduces our instrumental construction solution of excimer laser ablation coupled with plasma mass and optical emission spectrometry analysis techniques, and the technical problems and key experimental verification of independent research and relevant developments have been summarized and prospected.