Y2O3稳定ZrO2薄膜的结构和光学特性

用电子束蒸发法制备出四种不同Y2O3含量的Y2O3稳定ZrO2（YSZ）薄膜,用X射线衍射和透射光谱测定薄膜的结构和光学性能.结果表明：随着Y2O3含量的增加,ZrO2薄膜从单斜相向高温相（四方相和立方相）转变,获得了结构稳定的YSZ薄膜；YSZ薄膜的晶粒尺寸都比ZrO2薄膜的大,但随着Y2O3加入量的增加,晶粒尺寸有减小的趋势,薄膜表面也趋向光滑平整.所有YSZ薄膜的透射谱线都与ZrO2薄膜相似,在可见光和红外光区都有较高的透过率.Y2O3的加入还可以改变薄膜的折射率,在一定范围内可得到所需的任意折射率.

Structural And Optical Properties of Y2O3 Stabilized ZrO2 Thin Films

Four kinds of Y2O3 stabilized ZrO2 (YSZ) thin films with different Y2O3 content have been prepared by electron-beam evaporation method.The structural and optical properties of thin films were measured by X-ray diffraction spectra and transmission spectra.These results indicate that ZrO2 thin film changes from monoclinic phase to high temperature phase (tetragonal and cubic) with the increase of Y2O3 content and the structural stabilized thin films are obtained;the grain sizes of YSZ thin films are bigger than that of ZrO2 thin film.However,the grain size of YSZ thin films would decrease with the increase of Y2O3 content.The transmission spectra of YSZ thin films are similar to that of ZrO2 thin film and all of them have high transmission.Furthermore,the refractive index of YSZ thin films would change with the addition of Y2O3 and get the random refractive index in a certain range.