| 钇系超导体有机硅保护膜的磁控等离子体聚合 |
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| 引用本文： | 王锐,金心宇,陈抗生,梁素珍.钇系超导体有机硅保护膜的磁控等离子体聚合[J].物理化学学报,1996,12(9):769-772. |
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| 作者姓名： | 王锐 金心宇 陈抗生 梁素珍 |
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| 作者单位： | Department of Information and Electronics,Zhejiang University,Hangzhou 310027 |
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| 基金项目： | 国家教委专项基金，浙江省自然科学基金 |
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| 摘 要： |
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| 关 键 词： | 磁控等离子体聚合 钇钡铜氧化物超导体 有机硅保护膜 |
| 收稿时间： | 1996-05-22 |
| 修稿时间： | 1996-06-21 |
Study of Organic Silicon Protection Film by Magnetic-Controlling Plasma Polymerization on the Y-Ba-Cu-O Superconductor |
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| Wang Rui,Jin Xin-Yu,Cheng Kang-Sheng,Liang Su-Zhen.Study of Organic Silicon Protection Film by Magnetic-Controlling Plasma Polymerization on the Y-Ba-Cu-O Superconductor[J].Acta Physico-Chimica Sinica,1996,12(9):769-772. |
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| Authors: | Wang Rui Jin Xin-Yu Cheng Kang-Sheng Liang Su-Zhen |
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| Institution: | Department of Information and Electronics,Zhejiang University,Hangzhou 310027 |
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| Abstract: | A new method of deposition of organic silicon film by magnetic-controlling plasma polymerization was used to protect Y-Ba-Cu-O superconductor from corrosion. The deposition rate of plasma polymer film with magnetic-controlling is 20 times over that without magnetic-controlling. The relation between the deposition rate of film and the process factors of magnetic-controlling plasma were studied. The Y-Ba-Cu-O superconductor covered with organic silicon film was formed by magnetic-controlling plasma polymerization had been protected from corrosion in water over 48 hours. |
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| Keywords: | Magnetic-controlling plasma polymerization Y-Ba-Cu-O superconductor Organic silicon protective film |
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