氧化锰三维微型超级电容器电极制备及电化学特性

为增强电容器的电荷贮存能力，用MEMS技术在玻璃上制备高深宽比三维微电极结构，以增大电极的表面积，用阳极恒电压沉积在微电极表面沉积氧化锰作为电极活性物质，用循环伏安和恒流充放电方法对所备的电极进行了电化学性能测试，并用无结构的二维电极进行对比实验. 结果表明，三维电极结构能有效增强电容器的电荷贮存能力，在1.0 mA/cm²的充放电密度下，三维电极的单位底面积比电容达17.88 mF/cm²，是相应二维电极的7倍.

Preparation and Electrochemical Characteristics of Three-dimensional Manganese Oxide Micro-supercapacitor Electrode

In order to increase the electrode surface area and enhance the charge storage capacity, we study the micro electro mechanical system technology to fabricate three-dimensional high aspect ratio micro-electrode structure based on glass. The anodic constant potential method is employed to deposit manganese oxide as electroactive substances on the micro-electrode surface. Cyclic voltammetry and constant current charge-discharge method are both used to prepare electrode electrochemical performance testing, with a two-dimensional electrode without structure for comparison. Experimental results show that three-dimensional elec- trode structure can effectively enhance the charge storage capacity. At 1.0 mA/cm² charge-discharge density, the three-dimensional electrode shows a capacitance of 17.88 mF/cm², seven times higher than the two-dimensional electrode.