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Influence of surface structure on surface analytical statements
Authors:Karl Heinz Koch  Dieter Sommer  Dieter Grunenberg
Affiliation:(1) Chemische Laboratorien, Hoesch Stahl AG, P.O. Box 10 50 42, D-W 4600 Dortmund 1, Federal Republic of Germany
Abstract:The influence of surface structure of technical materials on results and statements of surface analytical methods has been investigated. Especially surface roughness as a typical property of rolled products has been observed. For this purpose samples of steel (technical surface, roughness up to 5 mgrm) and silicon wafers (polished surface) have been analyzed by SNMS and GDOS in order to get information about changes of the surface roughness as function of the sputtering time and their influence on the statements about the depth profiles obtained.
Keywords:depth profile analysis  surface roughness  SNMS  GDOS
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