一种使用线阵型CCD实现高精度二维位置测量的方法

介绍了一种使用ＣＣＤ测量位置的方法。与其它ＣＣＤ位置测量系统不同，通过设计一个特殊的光学系统，实现了使用两个线阵型ＣＣＤ进行高精度二维位置坐标测量。文中对该光学系统进行了误差分析，证实该方法具有很高的测量精度。该二维位置测量方法具有一些突出的优点：系统响应速度快，可以对动态目标进行测量；测量精度高；制造成本低。上述特点使它在工业制造领域内有着广阔的应用前景。

A method of measuring precisely two dimension position with linear array CCD

This paper introduces a new method for measuring position with CCD. This method is different from other optical systems for position measurement. By designing a special optical system with two linear array CCDs, two dimension position coordinates can be high precisely measured. In this paper, the measurement error of this optical system is analyzed and this system is proved to have a high precision. This two dimensional position measurement method with two linear array CCDs has some advantages: fast response, high accuracy and low cost. So, this method has a good future to apply in industry because of its attractive performance/cost ratios.